Stencil Lithography for Scalable Micro- and Nanomanufacturing
نویسندگان
چکیده
منابع مشابه
Stencil Lithography for Scalable Micro- and Nanomanufacturing
In this paper, we review the current development of stencil lithography for scalable microand nanomanufacturing as a resistless and reusable patterning technique. We first introduce the motivation and advantages of stencil lithography for large-area microand nanopatterning. Then we review the progress of using rigid membranes such as SiNx and Si as stencil masks as well as stacking layers. We a...
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Aluminum and gold nanowires were fabricated using 100 mm stencil wafers containing nanoslits fabricated with a focused ion beam. The stencils were aligned and the nanowires deposited on a substrate with predefined electrical pads. The morphology and resistivity of the wires were studied. Nanowires down to 70 nm wide and 5 mum long have been achieved showing a resistivity of 10 microOmegacm for ...
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A quantitative analysis of blurring and its dependence on the stencil-substrate gap and the deposition parameters in stencil lithography, a high resolution shadow mask technique, is presented. The blurring is manifested in two ways: first, the structure directly deposited on the substrate is larger than the stencil aperture due to geometrical factors, and second, a halo of material is formed su...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8040131